Micro/Nano Fabrication Laboratory

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Micro/Nano Fabrication Laboratory

This 5,000-square-foot clean room is used for the microfabrication of semiconductor and MEMS devices. Substrate sizes range up to six-inch diameter. A special strength of the lab is its ability to handle a wide variety of substrates, from the usual III-V and silicon semiconductor substrates, to the more unusual glass and metal and plastic foils used in novel display projects. The lab has a complete range of thin-film formation techniques available, such as plasma-enhanced chemical vapor deposition, thermal and electron-beam evaporators, sputterers, and high-temperature diffusion and oxidation. Another strength of the lab is pattern transfer by plasma, with five reactors dedicated to etching a wide range of thin films. The recent focus on nanopatterning capabilities prompted an installation of the state-of-the-art laser writer, nanoimprinter, and a modern electron beam writer.

Some examples of the structures fabricated in the laboratory:

Microfluidic blood separation device, separates white blood cells (blue) and red blood cells (red) from plasma. (David Inglis, author; collaboration of Profs. James Sturm, Electrical Engineering, Robert Austin, Physics, and Dr. David Lawrence, New York State Dept. of Health).

Periodic arrays of polymer pillars on silicon wafer (Ning Wu, author; Prof. William Russel, Chemical Engineering).

Nanocrystalline silicon thin-film transistors on clear plastic foil (Alex Kattamis, author; Prof. Sigurd Wagner, Electrical Engineering).

Second-order Bragg grating for quantum cascade lasers (Scott Howard, author; Prof. Claire Gmachl, Electrical Engineering).

Anti-dot array (250nm diameter and 750nm period) on a GaAs/AIGaAs heterostructure for mesoscopic transport measurements (Javad Shabani, author; Prof. Mansour Shayegan, Electrical Engineering).

Quantum cascade laser integration for on-chip sensing technologies (Kale Franz, author; Prof. Claire Gmachl, Electrical Engineering).

Copyright PRISM 2004
Princeton University, Princeton, NJ 08544 USA
21 Bowen Hall 70 Prospect Av. Princeton, NJ 08540-5211 609.258.4580