Micro/Nano Fabrication Laboratory

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CLEANROOM ACCESS FORM FOR FY2009/2010

PRISM Micro/Nano Lab Equipment Status

Tool Up Dn Comments Tool Up Dn Comments
Tystar ox X     Technics X    
Tystar poly   X   Raith e-beam wrtr X    
Tystar SiN X     Heidelberg laser wrtr X    
Tystar TEOS X     Nanonex imprinter X    
Thermco 1 X     NF Holography X    
Thermco 2 X     Karl Suss MJB3 X    
Thermco 3 X     Karl Suss MA6 X    
CVD ox X     KLA-Tencor Profil. X    
CVD anneal X     Gaertner ellips X    
RTA X     Nanospec reflect. X    
Si RTA X     BioRad ECV X    
Denton evap X     Dektak Profil. X    
Edwards evap X     Wafer Saw   X  
Angstrom Evaporator   X filament problem Flip Chip X    
AJA X     Wedge Bonder X    
Angstrom Sputterer X   RF cable fixed - thanks Bert Ball Bonder X    
Cambridge X            
790 RIE X     SAMCO 200iP X   BCl3 is now ok, all lines purged
790 PECVD X     SAMCO 800iPB X    
720 RIE X            
Tepla RIE X            
Astex ECR X            
November 18, 2009 11:36 AM
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