RCA Wet Hoods Manufacturer: Laminair (LM Air) Operating Instructions

General Information and Usage:
The wet bench has two plastic tanks for HF (BOE) etching, DI water rinse and four heated tanks. Two heated tanks are used to perform two steps of RCA clean. The other two heated tanks are used for H₃PO₄ and solution of H₂SO₄ and H₂O₂. So, the wet bench can only be used to do RCA clean, Si₃N₄ etching, and Piranha clean. For the hood layout click here.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Wet Hoods, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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