Varian ML91 Sealed Ampule Diffusion Manufacturer: Varian Operating Instructions Authorized Users

General Information and Usage:
Using this setup is dangerous. Besides the high temperatures, and the necessity of learning the skill of quartz welding, there is the general hazard of using hydrogen/oxygen flames. When hydrogen burns in oxygen, most of the energy is released in the infrared; thus, the flame is almost invisible.

This apparatus is used to diffuse arsenic (from ZnAs, as a source) into III-V substrates. The source and material are sealed in quartz ampule which is then placed inside a furnace for a period of time. The ampule is then cut open and the sample is removed.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Rapid Thermal Annealer, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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