Varian 979 Helium Leak Detector Manufacturer: Varian Operating Instructions Authorized Users

General Information and Usage:
Varian 979 Helium Leak Detector has a built-in turbo pump and an externally mounted dry forepump located below the system. The leak detector is configured for the evacuation type leak testing. In this case, the vacuum system under test is evacuated by the leak detector. Helium is then sprayed on the outside of the vacuum system and is pumped into the leak detector if a leak is present. The leak detector is capable to detect leaks down to 10^-9 atm-cc/sec range. Depending on the size of the leak, the internal leak rate response time is from 0.5 to 979 seconds.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Varian Leak Detector, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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