Tytan Stack Tube #3 Manufacturer: Tystar Operating Instructions Authorized Users

General Information and Usage: Tube #3
The Tystar Thermal Nitride Furnace is for the deposition of silicon nitride through the thermal decomposition of dichlorosilane and ammonia at 750°C.

Because this furnace is primarily used for silicon MOSFETS, it is very important to minimize contamination of the furnace. No metals are allowed in the furnace; all samples that have gone through any processing steps that included metal deposition must have the metal stripped off and cleaned using a standard RCA clean before being placed in the furnace.

Growth History

Maintenance Instructions

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Tystar Tytan Tube #3, please contact Conrad Silvestre, Joe Palmer, or Mikhail Gaevski using e-mail addresses below.