Thermco Furnaces Manufacturer: Therma Operating Instructions Authorized Users

General Information and Usage:
The Thermco furnaces are a stack of 3 horizontal furnaces used for anneal and oxidation of 4" Si wafers, as well as smaller Si samples.
Each furnace is designated for a specific kind of anneal/oxidation, and can flow different gases as described below:

Furnace	Use	Gases
1	Clean metal anneal (only Ti or Al allowed) (NO ORGANICS, GLASS, STEEL)	N2, forming gas
2	Metal, glass, steel, organics, etc. anneal and oxidation	N2, Dry O2
3	clean Si ONLY anneal and oxidation (NO METAL, ORGANICS, ETC.)	N2, Dry O2, Wet O2

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Thermo Furnaces, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu.