Olympus MX51 Optical Microscope Manufacturer: Olympus Operating Instructions

General Information and Usage:
The Olympus MX51 is a high-resolution, reflected-light, optical microscope for 6-inch wafer inspection.  It offers brightfield and darkfield sample inspections.  The microscope is equipped with 10X eyepieces and five objectives (5X, 10X, 20X, 50X, and 100X).  Thus the maximum possible magnification is 1000X.  The 50X and 100X objectives have a long working distance and, therefore, the distance between the bottom of the objective and the top of the sample is never smaller than ~ 1 mm.  No authorization is required for the operation of the microscope.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Olympus Optical Microscope, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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