NanoSpec/AFT Interferometer measurement Manufacturer: Nanometrics Operating Instructions Authorized Users Vendor Manual

General Information and Usage:
Nanospec is used to measure the thickness of dielectric thin films such as silicon dioxide, silicon nitride and photoresist. It diffracts light from the halogen bulb and deuterium lamp into its component wavelengths from 200 to 900 nm. The spectrophotometer scans the light from short to long wavelengths and the microscope focuses this light onto the sample. The Nanospec then measures the resulting reflectance versus wavelength and, from this data, determines film thickness. The measurement range of the instrument is from 10 to 500,000Å, with the UV deuterium lamp required for film thickness under 100Å.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the NanoSpec/AFT, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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