Innovative System E-Beam Evaporator Manufacturer: Innovative System Engineering Operating Instructions Authorized Users

General Information and Usage:
The Innovative e-beam is a single-chamber system for the thin-film evaporation. The system has a load lock for increased pumping speed. A maximum of six different materials can be evaporated in one pump-down cycle, from the six pocket electron gun. The thickness of the metal is monitored in-situ by a thickness monitor. Substrates up to 8.5 inch diagonal can be attached to the substrate holder. The sample temperature usually does not exceed 200 oC. Only the following materials are available: Au, Cr, Ge, Ni, Pt, and Ti.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Innovative System E-Beam Evaporator, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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