Gaertner Scientific L3W16 Ellipsometer Manufacturer: Gaertner Scientific Operating Instructions Authorized Users

General Information and Usage:
Ellipsometer is used for measuring film thickness and refractive index, especially for a single transparent thin film on silicon substrate. The major disadvantage is the calculated film thickness isn’t unique, so before measurement you need to know the thickness range (within 2800 Å for SiO₂). Though complex film structures can be analyzed using two-angle incidence or two-wavelength measurement, this instruction is only for basic operation.

Contact Information for Users of POEM Micro/Nano Fabrication Lab:
For additional information regarding the Gaertner Ellipsometer, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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