EMS 1000 Hot Plate Manufacturer: Electronic Micro Systems Operating Instructions

General Information and Usage:

EMS 1000 hot plate is located in the nanoimprint hood.  It is used for pre-baking and/or cleaning wafers for nanoimprinting.  The maximum temperature is 250º C.  Two bake styles are available: contact and vacuum bake.  During the vacuum bake the substrate is held in intimate contact by vacuum ports in the chuck itself.  The vacuum is turned on manually.  In contact bake, the substrate is held against the surface of the chuck by gravity alone (no vacuum pulling on the substrate).

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the EMS 1000 Hot Plate, please contact Mikhail Gaevski using e-mail address below.