Denton/DV-502A E-Beam Evaporator Manufacturer: Denton Vacuum Operating Instructions Authorized Users

General Information and Usage:
Denton e-beam is a single-chamber system for the thin-film evaporation. A maximum of four different materials can be evaporated in one pump-down cycle, from the four pocket electron gun. The thickness of the metal is monitored in-situ by a thickness monitor. Substrates up to 5 inch diagonal can be attached to the rotating substrate holder. The sample temperature usually does not exceed 35^oC. The available materials are: Au, Ag, Al, Cr, Ge, Ni, Pd, Pt, Si, SiO₂, and Ti.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Denton/DV-502A, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princecton.edu.

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