Dektak/IIa Surface Profiler Manufacturer: Veeco Operating Instructions Authorized Users

General Information and Usage:
The Dektak consists of two parts: the Dektak itself, and the computer to its left that is used to control the machine. This machine is used to measure the vertical surface profile of a sample. A diamond-tipped stylus is lowered onto the sample, and the stage is slowly translated, causing the stylus to move up and down vertically as it moves along the surface. The vertical motion of the stylus is measured electrically and converted to a digital format. Any sample with a reasonably hard surface (hard-baked photoresist is fine) with a vertical range of 100 Å to 655 kÅ can be measured. Vertical resolution can be as low as 10 Å. Maximum sample thickness is 20 mm. The profile can be viewed on the screen and saved to disk to be printed. For information in addition to that provided here, consult the user’s manual (Veeco Meteorology Group, Dektak), located in the characterization lab. No authorization required. Follow the operating instructions.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Dektak/IIa Surface Profiler, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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