CVD 2 Stack Furnace Manufacturer: CVD Operating Instructions Authorized Users

General Information and Usage:
CVD 2 Stack Furnace is a dual-tube furnace. The lower tube is a 4-inch-diameter, single-zone tube for sealed-ampoule diffusion. No gas or exhaust connects to the tube. The upper tube is a three-zone furnace for wet oxidation. It has two N₂ gas lines connected to the tube. (Two additional gases can be added utilizing the two spare gas lines and flow meters.) The left flow meter controls the gas directly fed into the tube. It has a full scale of 20 L/min. The right flow-meter controls the gas flow into the bubbler. It has a full scale of 2 L/min. Limited by the type of thermocouple used, the maximum temperature is 800°C for both tubes.

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the CVD 2 Stack Furnace, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu.

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