Electron Cyclotron Resonance Etcher Manufacturer: Astex Operating Instructions Authorized Users

General Information and Usage:
Super dense plasma etching of III-V’s.
Etch Gases : BCl₃, Cl₂, Ar, O₂, SF₆, CF₄

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the ECR Etcher, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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