RTP-600S Rapid Thermal Annealer Manufacturer: Modular Process Technology Corp. Operating Instructions Authorized Users

General Information and Usage:
Processing temperatures from 250ºC to 1300ºC are accessible. The temperature ramp rate may be up to a maximum of 150ºC/sec. The temperature repeatability is +/- 2ºC with an accuracy of +/- 2ºC. The temperature may be measured by a thermocouple or a pyrometer. A type K thermocouple is used from 250ºC to 800ºC. A pyrometer is used from 800ºC to 1300ºC. Process data may be collected during a run cycle and stored in a data file for later display and analysis. The process and recipe data files are internally stored as DIF (Data Interchange Format) and can be exported as text files.

Maintenance Instructions

Vendor Manual

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Rapid Thermal Annealer, please contact the PRISM Staff at: PRISM-CLEANRM-OPS@princeton.edu

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