Heatpulse 610 Rapid Thermal Annealer Manufacturer: AG Associates Operating Instructions Authorized Users

General Information and Usage:
Ultra fast heating for annealing metal contacts in forming gas - general use (III-V compounds, etc.) No thermal paste is to be used in the RTA. Further, the user is required to know the decomposition temperature of the material placed in the RTA.

Material	Decomposition T ( 0C )
InP	370
GaAs	617

Contact Information for Users of PRISM Micro/Nano Fabrication Lab:
For additional information regarding the Rapid Thermal Annealer, please contact the PRISM Staff at:PRISM-CLEANRM-OPS@princeton.edu.

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