Mask Design

The users of the Microfabrication Laboratory often need to design masks for the photolithography. A computer designated for this purpose is located in the J-wing atrium of the Engineering Quadrangle (graduate students’ cubicles). To obtain the username and password, please see Helena Gleskova or Joseph Palmer. You can create mask designs using L-Edit Pro or AutoCAD LT. Once the design is completed, you may use Heidelberg DWL66 laser writer to make the mask. If you are not an authorized users of the laser writer and do not wish to become one you need to contact a company that would fabricate the masks for you. Depending on the mask size, mask material, minimum feature size, tolerated errors, etc., the price per mask starts at ~ 500 USD. If your minimum feature size is large, you may choose a substantially cheaper route and print the mask on a transparency film. This procedure is no longer done in-house. Click on the links below to obtain further information.

AutoCad LT Quick Start Guide
L-Edit Pro Quick Start Guide
Ordering Mask Sets
Photomask Design Using L-Edit Pro
Printing Masks on Transparency Films
Rules for Heidelberg DWL66 Laser Writer