Micro/Nano Fabrication Laboratory

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PRISM Micro/Nano Fabrication Laboratory

Waste Disposal Policies and Procedures

 

In accordance with the new EQUAD Corrosives Disposal Policy,

“Acids stronger than pH 2.0 and bases stronger than pH 12.0 may not be poured directly down the drain even if done so with copious amounts of water.  These materials should be sufficiently diluted and /or neutralized in a safe and effective manner to within the desired pH range, however neutralizing to pH 7.0 is preferred.  The resulting solution (2.0<pH<12.0) can then be poured down the drain with a moderate flow of tap water.  The SEAS stockroom has pH paper available for testing of the pH levels before disposal.”

the PRISM Micro/Nano Fabrication Lab now requires users to bottle most Acid, and Base waste, in addition to all Solvent waste.  The following chart describes the proper disposal method for the chemicals provided by the cleanroom.

 

Chemical

pH

Disposal Method

Classification

Acetic Acid

5-6

Drain

Acid

Acetone

--

Bottled

Solvent

Aluminum Etchant, AL-11

3-4

Drain

Acid

Ammonium Hydroxide

14

Bottled

Base

AZ300MIF

14

Bottled

Base

AZ312MIF

14

Bottled

Base

AZ400

14

Bottled

Base

AZ421

14

Bottled

Base

Baker PRS-1000

--

Bottled

Solvent

BOE 6:1 w/Surfactant

5

Bottled

Acid (HF)

BOE 10:1 w/Surfactant

6

Bottled

Acid (HF)

Chlorobenzene

--

Bottled

Solvent

Ethylene Glycol

--

Bottled

Solvent

Gold Etchant (KI, I2 solution)

8

Drain

Acid

Hydrobromic Acid

 

Bottled

Acid

Hydrochloric Acid

0

Bottled

Acid

Hydrofluoric Acid

0

Bottled

Acid

Isopropanol

--

Bottled

Solvent

Methanol

--

Bottled

Solvent

Methyl Isobutyl Ketone (MIBK)

--

Bottled

Solvent

Methylethylketone

--

Bottled

Solvent

Nano Remover PG

--

Bottled

Solvent

Nano-Strip 2X

--

Bottled

Solvent

Nitric Acid

0-1

Bottled

Acid

Phosphoric Acid

5

Drain

Acid

PRS-1000

 

Bottled

Solvent

Shipley Developer MF319

--

Bottled

Solvent

Shipley Remover 1165

--

Bottled

Solvent

Sulfuric Acid

0

Bottled

Acid

Toluene CMOS Grade

--

Bottled

Solvent

Trichloroethylene

--

Bottled

Solvent

RCA Clean Solutions

 

 

 

NH4OH:H2O2:DI (1:1:5)

9.5

Drain

Base

HF 1:10

0

Bottled

Acid

HCl:H2O2:DI (1:1:5)

0

Bottled*

Acid

H2SO4:H2O2 (1:1)

0

Bottled*

Acid

HCl:H2O2 (1:1)

0

Bottled*

Acid

*Bottle after reaction of peroxide is done.

 

 

 

 

Solvents and Bases to be Bottled

All Solvent Hoods contain at least one Solvent Waste Disposal Bottle with an attached funnel (and lid).  This should be used to dispose of solvents and any base with a pH greater than 12. 

 

Acids to be Bottled

The General Purpose Acid Hood has 4 Waste Disposal Bottles to segregate the acids according to type and reactivity. 

  1. All acid solutions containing Hydrofluoric Acid (this includes any Buffered Oxide Etch) are segregated due to the cost of disposing of fluorinated chemicals. 
  2. Nitric Acid and Chrome Etchant (CR-7) waste are stored in their own separate container due to reactivity. 
  3. Hydrobromic Acid, Hydrochloric Acid, and Sulfuric Acid are disposed of in a third container.
  4. Sulfuric Acid and Hydrogen Peroxide mixtures (Pirhana Etch), are disposed of in bottle 4.

 

Drain?

While some acids and bases can go down the drain, they must be diluted.  Run the cold tap water before, during, and after disposal for at least 2 minutes for a total of 6 minutes.

 

Hydrogen Peroxide Solutions

Hydrogen Peroxide is unstable and naturally decomposes into water and oxygen.  When different chemicals are mixed with it, this decomposition rate can accelerate.  Solutions containing Hydrogen Peroxide should never be put in a tightly closed bottle, as this will eventually lead to the bottle bursting from the resulting build up of pressure.  The remaining chemicals in the solution should determine the proper disposal method.  Pure Hydrogen Peroxide can be put down the drain.

 

What about….?

The disposal of any chemical not covered by this document should be discussed with Joseph Palmer, or another member of PRISM staff before the chemical is used.  If questionable waste has been generated, segregate it into its own container (properly labeled), and bring it to the attention of PRISM Staff immediately.

Copyright PRISM 2004
Princeton University, Princeton, NJ 08544 USA
21 Bowen Hall 70 Prospect Av. Princeton, NJ 08540-5211 609.258.4580