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PRISM
Micro/Nano Fabrication Laboratory
Waste
Disposal Policies and Procedures
In accordance with the new
EQUAD Corrosives Disposal Policy,
“Acids stronger than pH 2.0 and bases
stronger than pH 12.0 may not be poured directly down the drain even if done so
with copious amounts of water. These
materials should be sufficiently diluted and /or neutralized in a safe and
effective manner to within the desired pH range, however neutralizing to pH 7.0
is preferred. The resulting solution
(2.0<pH<12.0) can then be poured down the drain with a moderate flow of
tap water. The SEAS stockroom has pH
paper available for testing of the pH levels before disposal.”
the PRISM
Micro/Nano Fabrication Lab now requires users to
bottle most Acid, and Base waste, in addition to all Solvent waste. The following chart describes the proper
disposal method for the chemicals provided by the cleanroom.
|
Chemical
|
pH
|
Disposal Method
|
Classification
|
|
Acetic
Acid
|
5-6
|
Drain
|
Acid
|
|
Acetone
|
--
|
Bottled
|
Solvent
|
|
Aluminum
Etchant, AL-11
|
3-4
|
Drain
|
Acid
|
|
Ammonium
Hydroxide
|
14
|
Bottled
|
Base
|
|
AZ300MIF
|
14
|
Bottled
|
Base
|
|
AZ312MIF
|
14
|
Bottled
|
Base
|
|
AZ400
|
14
|
Bottled
|
Base
|
|
AZ421
|
14
|
Bottled
|
Base
|
|
Baker
PRS-1000
|
--
|
Bottled
|
Solvent
|
|
BOE
6:1 w/Surfactant
|
5
|
Bottled
|
Acid
(HF)
|
|
BOE
10:1 w/Surfactant
|
6
|
Bottled
|
Acid (HF)
|
|
Chlorobenzene
|
--
|
Bottled
|
Solvent
|
|
Ethylene
Glycol
|
--
|
Bottled
|
Solvent
|
|
Gold
Etchant (KI, I2 solution)
|
8
|
Drain
|
Acid
|
|
Hydrobromic
Acid
|
|
Bottled
|
Acid
|
|
Hydrochloric
Acid
|
0
|
Bottled
|
Acid
|
|
Hydrofluoric
Acid
|
0
|
Bottled
|
Acid
|
|
Isopropanol
|
--
|
Bottled
|
Solvent
|
|
Methanol
|
--
|
Bottled
|
Solvent
|
|
Methyl
Isobutyl Ketone (MIBK)
|
--
|
Bottled
|
Solvent
|
|
Methylethylketone
|
--
|
Bottled
|
Solvent
|
|
Nano
Remover PG
|
--
|
Bottled
|
Solvent
|
|
Nano-Strip
2X
|
--
|
Bottled
|
Solvent
|
|
Nitric
Acid
|
0-1
|
Bottled
|
Acid
|
|
Phosphoric
Acid
|
5
|
Drain
|
Acid
|
|
PRS-1000
|
|
Bottled
|
Solvent
|
|
Shipley
Developer MF319
|
--
|
Bottled
|
Solvent
|
|
Shipley
Remover 1165
|
--
|
Bottled
|
Solvent
|
|
Sulfuric
Acid
|
0
|
Bottled
|
Acid
|
|
Toluene
CMOS Grade
|
--
|
Bottled
|
Solvent
|
|
Trichloroethylene
|
--
|
Bottled
|
Solvent
|
|
RCA
Clean Solutions
|
|
|
|
|
NH4OH:H2O2:DI
(1:1:5)
|
9.5
|
Drain
|
Base
|
|
HF
1:10
|
0
|
Bottled
|
Acid
|
|
HCl:H2O2:DI
(1:1:5)
|
0
|
Bottled*
|
Acid
|
|
H2SO4:H2O2
(1:1)
|
0
|
Bottled*
|
Acid
|
|
HCl:H2O2
(1:1)
|
0
|
Bottled*
|
Acid
|
|
*Bottle
after reaction of peroxide is done.
|
|
|
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Solvents and Bases to be
Bottled
All Solvent Hoods contain at least
one Solvent Waste Disposal Bottle with an attached funnel (and lid). This should be used to dispose of solvents
and any base with a pH greater than 12.
Acids to be Bottled
The General Purpose Acid Hood
has 4 Waste Disposal Bottles to segregate the acids according to type and
reactivity.
- All acid solutions containing Hydrofluoric Acid (this includes any Buffered Oxide Etch) are segregated due to the cost of
disposing of fluorinated chemicals.
- Nitric Acid
and Chrome Etchant (CR-7) waste are stored in their
own separate container due to
reactivity.
- Hydrobromic
Acid, Hydrochloric Acid,
and Sulfuric Acid are disposed
of in a third container.
- Sulfuric Acid and Hydrogen Peroxide mixtures (Pirhana Etch), are disposed of in bottle 4.
Drain?
While some acids and bases can
go down the drain, they must be diluted.
Run the cold tap water before, during, and after disposal for at least 2 minutes for a total of 6
minutes.
Hydrogen Peroxide Solutions
Hydrogen Peroxide is unstable
and naturally decomposes into water and oxygen.
When different chemicals are mixed with it, this decomposition rate can
accelerate. Solutions containing
Hydrogen Peroxide should never
be put in a tightly closed bottle, as this will eventually lead to the bottle
bursting from the resulting build up of pressure. The remaining chemicals in the solution
should determine the proper disposal method.
Pure Hydrogen Peroxide can be put down the drain.
What about….?
The disposal of any chemical
not covered by this document should be discussed with Joseph Palmer, or another
member of PRISM staff before the chemical is used. If questionable waste has been generated,
segregate it into its own container (properly
labeled), and bring it to the attention of PRISM Staff immediately.
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